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Felim Vajda
Felim Vajda
Dielectric
Plasma
Inorganic chemistry
Chemistry
Porosity
4
Papers
50
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Multi-metallic Hydrate Hollow Structures in Cobalt Hydrate Based Systems
2017
Crystal Growth & Design
Yanhui Chen
Junfeng Zhou
Felim Vajda
Pierce Maguire
Robert J. OConnell
Wolfgang Schmitt
Yonghe Li
Zhengguang Yan
Yuefei Zhang
Hongzhou Zhang
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Citations (1)
Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
2015
Journal of Applied Physics
J.-F. de Marneffe
Le Qi Zhang
Markus Heyne
Mikolaj Lukaszewicz
S. B. Porter
Felim Vajda
Vito Rutigliani
Z. el Otell
Mikhail Krishtab
Andy Goodyear
Mike Cooke
P. Verdonck
M. R. Baklanov
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Citations (20)
Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach
2015
ECS Journal of Solid State Science and Technology
Liping Zhang
Jean-Francois de Marneffe
Markus Heyne
Sergej Naumov
Yiting Sun
Alexey Zotovich
Ziad El Otell
Felim Vajda
Stefan De Gendt
Mikhail R. Baklanov
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Citations (29)
Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
2014
Liping Zhang
Jean-Francois de Marneffe
Mikolaj Lukaszewicz
Stephen Barry-Porter
Felim Vajda
Yiting Sun
Markus Heyne
Mikhaïl Baklanov
Vito Rutiqlian
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