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Z. el Otell
Z. el Otell
Open University
Ion
Chemistry
Dielectric
Thin film
Plasma
3
Papers
28
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Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
2015
Journal of Applied Physics
J.-F. de Marneffe
Le Qi Zhang
Markus Heyne
Mikolaj Lukaszewicz
S. B. Porter
Felim Vajda
Vito Rutigliani
Z. el Otell
Mikhail Krishtab
Andy Goodyear
Mike Cooke
P. Verdonck
M. R. Baklanov
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Citations (20)
Development of a novel wafer-probe for in situ measurements of thin film properties
2015
Plasma Sources Science and Technology
Z. el Otell
Daniil Marinov
Vladimir Samara
Mark Bowden
J.-F. de Marneffe
Patrick Verdonck
N St J Braithwaite
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Multi-photon and electron impact ionisation studies of reactivity in adenine-water clusters
2014
International Journal of Mass Spectrometry
B. Barc
M. Ryszka
Jean-Christophe Poully
E. Jabbour Al Maalouf
Z. el Otell
J. Tabet
R. Parajuli
P J M van der Burgt
P. Limão-Vieira
P. Cahillane
Marcin Dampc
Nigel J. Mason
S. Eden
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Citations (8)
1