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Matthias Neuenschwander
Matthias Neuenschwander
École Polytechnique Fédérale de Lausanne
Polymer
Cantilever
Materials science
Fabrication
Nanotechnology
3
Papers
4
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0
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Self-Actuated Polymer-Based Cantilevers with Sharp Silicon Tips for High-Speed Atomic Force Microscopy
2021
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Matthias Neuenschwander
Santiago H. Andany
Mustafa Kangül
Nahid Hosseini
Georg E. Fantner
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Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process
2019
Beilstein Journal of Nanotechnology
Nahid Hosseini
Matthias Neuenschwander
Oliver Peric
Santiago H. Andany
Jonathan D. Adams
Georg E. Fantner
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Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy
2019
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Nahid Hosseini
Oliver Peric
Matthias Neuenschwander
Santiago H. Andany
Jonathan D. Adams
Georg E. Fantner
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