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S. G. Woo
S. G. Woo
Samsung
Metrology
Optical proximity correction
Photolithography
Engineering drawing
Integrated circuit
2
Papers
5
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0
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Novel methodology of employing scatterometry to assess optical proximity correction test pattern
2005
Sungsoo Suh
I. S. Kim
E. M. Lee
Y.-S. Kang
S.J. Lee
S. G. Woo
H. K. Cho
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30.3: Discharge Characteristics of High Efficiency Rib and its Optimized Electrodes (HERO) using High Xe Gas Mixture
2004
K. D. Kang
J. I. Kwon
Woo-Tae Kim
Hun-Suk Yoo
S. G. Woo
Eun-Young Jung
J. C. Ahn
S.J. Kim
Eun-gi Heo
Won-Ju Yi
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Citations (5)
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