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I. S. Kim
I. S. Kim
Samsung
Electronic engineering
Metrology
Optical proximity correction
Photolithography
Engineering drawing
2
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High performance Cu/low-k interconnect strategy beyond 10nm logic technology
2015
IITC | International Interconnect Technology Conference
R.-H. Kim
Byung-hee Kim
Jinseok Kim
Jang-Hee Lee
Jongmin Baek
J.H. Hwang
J.W. Hwang
J. Chang
S.Y. Yoo
T. J. Yim
K.-M. Chung
Kang-Wook Park
T. Oszinda
I. S. Kim
E.B. Lee
Sang-don Nam
S. Jung
Y.W. Cho
Hyunjun Choi
Jang-ho Kim
Sanghoon Ahn
S. H. Park
B. U. Yoon
J.-H. Ku
S.S. Paak
Nae-in Lee
Seungwook Choi
H.K. Kang
Eunseung Jung
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Novel methodology of employing scatterometry to assess optical proximity correction test pattern
2005
Sungsoo Suh
I. S. Kim
E. M. Lee
Y.-S. Kang
S.J. Lee
S. G. Woo
H. K. Cho
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