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H Marko
H Marko
Los Angeles Harbor College
Membrane
Materials science
Electronic engineering
Nanoelectromechanical systems
Microelectromechanical systems
3
Papers
1
Citations
0
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2024
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Ultra-thin membrane based MEMS and NEMS technologies: actuation, sensing and energy considerations
2013
L Montes
R Lefevre
A Salette
D Rabaud
L Dargent
H Marko
X. Xu
Alexis Potié
B Bercu
R. Hinchet
F Rochette
G. Ardila
P Morfouli
M Mouis
C. Dehan
Masne Q. Le
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Innovative SOI based MEMS using large deformation ultra-thin membranes: From micropumps to piezo-NEMS
2013
L Montes
R Lefevre
A Salette
D Rabaud
L Dargent
H Marko
X. Xu
Alexis Potié
B Bercu
R. Hinchet
F Rochette
G. Ardila
P Morfouli
M Mouis
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Thermally actuated micropump for biological and medical application
2013
D Rabaud
R Lefevre
A Salette
L Dargent
H Marko
Q. Le Masne
C. Dehan
P. Morfouli
L Montes
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Citations (1)
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