Old Web
English
Sign In
Acemap
>
authorDetail
>
Ching-Hua Hsieh
Ching-Hua Hsieh
Sputtering
Microstructure
Sputter deposition
Inorganic chemistry
Crystallite
3
Papers
14
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Systems and methods for integrated Re-sputtering in a physical vapor deposition chamber
2014
Shing-Chyang Pan
Ching-Hua Hsieh
Minghsing Tsai
Syun-Ming Jang
Show All
Source
Cite
Save
Citations (0)
Growth of (Ti,Zr)N Films on Si by DC Reactive Sputtering of TiZr in N 2 / Ar Gas Mixtures Effect of Flow Ratio
2004
Journal of The Electrochemical Society
Yu-Lin Kuo
Chiapyng Lee
Jing-Cheng Lin
Chao-Hsien Peng
Li-Chien Chen
Ching-Hua Hsieh
Shau-Lin Shue
Mong-Song Liang
Brian J. Daniels
Cheng-Lin Huang
Chih-Huang Lai
Show All
Source
Cite
Save
Citations (7)
Characteristics of DC Reactively Sputtered (Ti,Zr)N Thin Films as Diffusion Barriers for Cu Metallization
2003
Electrochemical and Solid State Letters
Yu-Lin Kuo
Chiapyng Lee
Jing-Cheng Lin
Chao-Hsien Peng
Li-Chien Chen
Ching-Hua Hsieh
Shau-Lin Shue
Mong-Song Liang
Brian J. Daniels
Cheng-Lin Huang
Chih-Huang Lai
Show All
Source
Cite
Save
Citations (7)
1