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Syuichi Kikuchi
Syuichi Kikuchi
Optoelectronics
Photolithography
Nanotechnology
Photomask
Materials science
3
Papers
9
Citations
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Damage analysis of EUV mask under Ga focused ion beam irradiation
2008
Yasushi Nishiyama
Tsuyoshi Amano
Hiroyuki Shigemura
Tsuneo Terasawa
Osamu Suga
Tomokazu Kozakai
Syuichi Kikuchi
Kensuke Shiina
Anto Yasaka
Ryoji Hagiwara
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Citations (5)
A semi-automated AFM photomask repair process for manufacturing application using SPR6300
2007
Mario Dellagiovanna
Hidenori Yoshioka
Hiroyuki Miyashita
Shiaki Murai
Takuya Nakaue
Osamu Takaoka
Atsushi Uemoto
Syuichi Kikuchi
Ryoji Hagiwara
Stephane Benard
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Citations (2)
Advanced photomask repair technology for 65-nm lithography (1)
2004
Yasutoshi Itou
Yoshiyuki Tanaka
Nobuyuki Yoshioka
Yasuhiko Sugiyama
Ryoji Hagiwara
Haruo Takahashi
Osamu Takaoka
Junichi Tashiro
Katsumi Suzuki
Mamoru Okabe
Syuichi Kikuchi
Atsushi Uemoto
Anto Yasaka
Tatsuya Adachi
Naoki Nishida
Toshiya Ozawa
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Citations (2)
1