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Wan Soo Song
Wan Soo Song
Myongji University
X-ray photoelectron spectroscopy
Infrared
Miniaturization
Amorphous carbon
Dielectric
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Surface Analysis of TMCTS-Based SiOC(H) Low-k Dielectrics in Post-Etch Strip of ACL Hardmask.
2021
Materials
Min Kyu Park
Wan Soo Song
Min Ho Kim
Sang Jeen Hong
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