Old Web
English
Sign In
Acemap
>
authorDetail
>
Steven C. Buswell
Steven C. Buswell
Nanolithography
Electron-beam lithography
Resist
Materials science
Nanotechnology
4
Papers
278
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Nanopatterning of PMMA on insulating surfaces with various anticharging schemes using 30 keV electron beam lithography
2011
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Mustafa Muhammad
Steven C. Buswell
S. K. Dew
Maria Stepanova
Show All
Source
Cite
Save
Citations (21)
The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution
2010
Mohammad Ali Mohammad
Taras Fito
Jiang Chen
Steven C. Buswell
Mirwais Aktary
S. K. Dew
Maria Stepanova
Show All
Source
Cite
Save
Citations (7)
Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithography
2010
Microelectronic Engineering
Mohammad Ali Mohammad
T. Fito
J. Chen
Steven C. Buswell
M. Aktary
Maria Stepanova
S. K. Dew
Show All
Source
Cite
Save
Citations (22)
Mathematical Markup Language (MathML) Version 3.0
2001
WWW | The Web Conference
Patrick Ion
Robert R. Miner
Ron Ausbrooks
Steven C. Buswell
David Carlisle
Giorgi Chavchanidze
Stéphane Dalmas
Stan Devitt
Angel Díaz
Samuel S. Dooley
Roger Hunter
Michael Kohlhase
Azzeddine Lazrek
Paul Libbrecht
Bruce R. Miller
Chris Rowley
Murray Sargent
Bruce T. Smith
Neil Soiffer
Robert S. Sutor
Stephen M. Watt
Show All
Source
Cite
Save
Citations (228)
1