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Alex Joseph Varghese
Alex Joseph Varghese
IBM
2
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Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique
2021
ASMC | Advanced Semiconductor Manufacturing Conference
Graham Jensen
Vidyasagar Anantha
Alexa Greer
Raghav Babulnath
Satya Kurada
Brad Austin
Shravan Matham
Alex Joseph Varghese
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A holistic characterization methodology for stochastic printing failures in EUV contact holes
2021
ASMC | Advanced Semiconductor Manufacturing Conference
Jennifer Church
Brad Austin
Luciana Meli
Alex Joseph Varghese
Teresa A. Esposito
DukKyun Moon
Nathaniel Mowell
Felix Levitov
Uri Smolyan
Omri Baum
Paz Yabbo
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