Old Web
English
Sign In
Acemap
>
authorDetail
>
Kazuhide Hasebe
Kazuhide Hasebe
Silicon nitride
Dichlorosilane
Thin layers
Plasma-enhanced chemical vapor deposition
Ammonia
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Silicon Nitride Molecular Layer Deposition Process Development using Dichlorosilane and Ammonia
2007
David L. O'Meara
Kaoru Matsushita
Kazuhide Hasebe
Anthony Dip
Renee Mo
Paul Higgins
Shingo Maku
Michael P. Chudzik
M. Gribelyuk
Leo Tai
Show All
Source
Cite
Save
Citations (1)
1