Old Web
English
Sign In
Acemap
>
authorDetail
>
Paul Higgins
Paul Higgins
IBM
Engineering
Failure rate
Manufacturing engineering
Downtime
Chemical vapor deposition
3
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Method of problem solving to diagnose high particle failures due to unique rotation stopping position: CFM: Contamination free manufacturing
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Jessica Gruss-Gifford
Thomas J. Haigh
Paul Hall
Jean E. Wynne
John Grassucci
David L. O'Meara
Josh Prendergast
Kyle Dwyer
Paul Higgins
Show All
Source
Cite
Save
Citations (0)
Silicon Nitride Molecular Layer Deposition Process Development using Dichlorosilane and Ammonia
2007
David L. O'Meara
Kaoru Matsushita
Kazuhide Hasebe
Anthony Dip
Renee Mo
Paul Higgins
Shingo Maku
Michael P. Chudzik
M. Gribelyuk
Leo Tai
Show All
Source
Cite
Save
Citations (1)
Significant improvement of LPCVD nitride furnace availability by dedicating "thick" and "thin" processes
2005
ISSM | International Symposium on Semiconductor Manufacturing
Stephen Fugardi
Paul Higgins
Mark Hansen
John K. Chan
Show All
Source
Cite
Save
Citations (0)
1