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Takayuki Iwamatsu
Takayuki Iwamatsu
Toshiba
Transmittance
Phase (waves)
Optics
Phase-shift mask
Materials science
4
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4
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Passivate SiNx halftone phase shifting mask for deep ultraviolet exposure
1996
Journal of Vacuum Science & Technology B
S. Ito
Takayuki Iwamatsu
Hiroyuki Sato
Masafumi Asano
Kenji Kawano
F. Miyashita
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Citations (2)
Evaluation of phase and transmittance error on deep-UV halftone phase-shift mask
1996
Suigen Kyoh
Hideaki Sakurai
Takayuki Iwamatsu
Akiko Yamada
Iwao Higashikawa
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Lithographic performance of SiNx single-layer halftone mask
1995
Kenji Kawano
Masafumi Asano
Satoshi Tanaka
Takayuki Iwamatsu
Hiroyuki Sato
Shinichi Ito
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Deep-UV attenuated phase-shift mask for a quarter-micrometer photolithography
1995
Suigen Kyoh
Hideaki Sakurai
Takayuki Iwamatsu
Iwao Higashikawa
Rikiya Taniguchi
Hidehiro Watanabe
Takashi Tuchiya
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