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Hiroyuki Sato
Hiroyuki Sato
Toshiba
Halftone
Optics
Lithography
Materials science
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4
Papers
15
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Passivate SiNx halftone phase shifting mask for deep ultraviolet exposure
1996
Journal of Vacuum Science & Technology B
S. Ito
Takayuki Iwamatsu
Hiroyuki Sato
Masafumi Asano
Kenji Kawano
F. Miyashita
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Citations (2)
Lithographic performance of SiNx single-layer halftone mask
1995
Kenji Kawano
Masafumi Asano
Satoshi Tanaka
Takayuki Iwamatsu
Hiroyuki Sato
Shinichi Ito
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Optimization of optical properties for single-layer halftone masks
1994
Shinichi Ito
Hiroaki Hazama
Takashi Kamo
Hideya Miyazaki
Hiroyuki Sato
Kenji Hayashi
Fumiaki Shigemitsu
Ichiro Mori
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Citations (7)
Practice of quality modelling and measurement on software life-cycle
1990
ICSE | International Conference on Software Engineering
Masayuki Hirayama
Hiroyuki Sato
Atushi Yamada
Junichiro Tsuda
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Citations (5)
1