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K. K. Tedjojuwono
K. K. Tedjojuwono
Langley Research Center
Profilometer
Dry etching
Mercury cadmium telluride
Scanning electron microscope
Surface roughness
1
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Uniformity studies of inductively coupled plasma etching in fabrication of HgCdTe detector arrays
2007
R. Bommena
S. Velicu
P. Boieriu
T. S. Lee
C.H. Grein
K. K. Tedjojuwono
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