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Kanstantsin Shchehlik
Kanstantsin Shchehlik
Machine learning
Lithography
Artificial intelligence
Computer science
Flow (psychology)
1
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4
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Using machine learning in the physical modeling of lithographic processes
2019
Kostas Adam
Shashidhara K. Ganjugunte
Clement Moyroud
Kanstantsin Shchehlik
Michael C. Lam
Andrew Burbine
Germain Fenger
Yuri Granik
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Citations (4)
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