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Bong-seok Suh
Bong-seok Suh
Samsung
Metallurgy
Materials science
Annealing (metallurgy)
Electromigration
Electrical resistance and conductance
2
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4
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0
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Integration and reliability of a noble TiZr/TiZrN alloy barrier for Cu/low-k interconnects
2005
IITC | International Interconnect Technology Conference
Bong-seok Suh
Seung-Man Choi
Young Jin Wee
Jung-eun Lee
Jun-Ho Lee
Sun-jung Lee
Soo-Geun Lee
Hong-jae Shin
Nae-in Lee
Ho-Kyu Kang
Kwang Pyuk Suh
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Advanced i-PVD barrier metal deposition technology for 90 nm Cu interconnects
2003
IITC | International Interconnect Technology Conference
Kyu-Charn Park
I. R. Kim
Bong-seok Suh
Seungwook Choi
Won-sang Song
Young Jin Wee
Sun-jung Lee
J.S. Chung
J. H. Chung
S.R. Hah
Jeong-Hoon Ahn
Ki-Jong Lee
H. K. Kang
K.P. Suh
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Citations (2)
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