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Kyo Otsubo
Kyo Otsubo
Toshiba
Photolithography
Photomask
Wafer
Engineering
Lithography
4
Papers
8
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Novel cleaning technology for nanoparticle removal
2019
Mana Tanabe
Kosuke Takai
Kyo Otsubo
Kaori Umezawa
Minako Iinuma
Hideaki Sakurai
Shingo Kanamitsu
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Novel model of haze generation on photomask
2008
Haruko Akutsu
Shinji Yamaguchi
Kyo Otsubo
Makiko Tamaoki
Ayako Shimazaki
Reiko Yoshimura
Fumihiko Aiga
Tsukasa Tada
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Citations (4)
Application of two-fluid nozzles for advanced photomask cleaning process
2008
Kenji Masui
Tetsuo Takemoto
Kyo Otsubo
Mari Sakai
Tomotaka Higaki
Hidehiro Watanabe
Tsutomu Kikuchi
Yoshiaki Kurokawa
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Citations (2)
Mask Quality Assurance in Cleaning for Haze Elimination Using Flexible Mask Specifications
2007
Kyo Otsubo
Shinji Yamaguchi
Yukiyasu Arisawa
Hidefumi Mukai
Toshiya Kotani
Hiromitsu Mashita
Hiromitsu Hashimoto
Takashi Kamo
Tomohiro Tsutsui
Osamu Ikenaga
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Citations (1)
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