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Peter Frisella
Peter Frisella
Materials science
Analytical chemistry
Bell jar
Temperature control
Sheet resistance
2
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2
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0
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2024
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Improvement of within Wafer Uniformity of Device Parameters by Gradient Temperature Control with Bell Jar Hot Wall RTP
2006
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Kyung-Won Lee
Steve Kim
Peter Frisella
Brad Jacobs
Gary Cai
Ron Reece
Noh Yeal Kwak
Chul‐Young Ham
KwangChul Joo
Dong‐Ho Lee
Sang Wook Park
Sungki Park
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UV curing technology for advanced device fabrication: challenges and solutions
2006
SSICT | International Conference on Solid-State and Integrated Circuits Technology
Carlo Waldfried
Palanikumaran Sakthivel
Peter Frisella
Darren Moore
Ivan Berry
Kevin Durr
Qingyuan Han
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