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Palanikumaran Sakthivel
Palanikumaran Sakthivel
Non-volatile memory
Dielectric
UV curing
Ultraviolet
Transistor
2
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1
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0
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UV curing technology for advanced device fabrication: challenges and solutions
2006
SSICT | International Conference on Solid-State and Integrated Circuits Technology
Carlo Waldfried
Palanikumaran Sakthivel
Peter Frisella
Darren Moore
Ivan Berry
Kevin Durr
Qingyuan Han
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Appareil au plasma, ensemble de distribution de gaz pour appareil au plasma et procédés correspondants
2004
Alan Becknell
Thomas Buckley
David Ferris
Richard Pingree
Palanikumaran Sakthivel
Aseem Srivastava
Carlo Waldfried
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