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Masanori Oosawa
Masanori Oosawa
Chemistry
High-κ dielectric
Analytical chemistry
Structural change
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5
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34
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Etching of High-k Dielectric HfO2 Films in BCl3-Containing Plasmas Enhanced with O2 Addition
2006
Japanese Journal of Applied Physics
Tomohiro Kitagawa
Keisuke Nakamura
Kazushi Osari
Kazuo Takahashi
Kouichi Ono
Masanori Oosawa
Satoshi Hasaka
Minoru Inoue
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Citations (26)
Structural Changes of Y 2 O 3 and La 2 O 3 Films by Heat Treatment
2006
Takashi Yamamoto
Yukiko Izumi
Hideki Hashimoto
Masanori Oosawa
Yoshihiro Sugita
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Citations (3)
Structural Changes of Y2O3 and La2O3 Films by Heat Treatment
2006
Japanese Journal of Applied Physics
Takashi Yamamoto
Yukiko Izumi
Hideki Hashimoto
Masanori Oosawa
Yoshihiro Sugita
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Thermal Stability of the Yttrium Aluminate Film and the Suppression of its structural change and electrical properties degradation
2005
The Japan Society of Applied Physics
Takashi Yamamoto
Yukiko Izumi
Takashi Miyamoto
Hirohumi Seki
Hideki Hashimoto
Minoru Inoue
Masanori Oosawa
Satoshi Hasaka
Yoshihiro Sugita
Kazuto Ikeda
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Physical and Electrical Properties of Ultra Thin Yttrium-Aluminate Film
2005
Hyomen Kagaku
Yoshihiro Sugita
Kazuto Ikeda
Yukiko Izumi
Takashi Yamamoto
Hideki Hashimoto
Minoru Inoue
Masanori Oosawa
Satoshi Hasaka
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