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R. Seidel
R. Seidel
GlobalFoundries
Optoelectronics
Back end of line
Band gap
Schottky barrier
Engineering
2
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4
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0
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BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms
2020
IRPS | International Reliability Physics Symposium
B. Wehring
R Hoffmann
Lukas Gerlich
M. Czernohorsky
Benjamin Uhlig
R. Seidel
T. Barchewitz
F. Schlaphof
L. Meinshausen
C. Leyens
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Energy Harvesting in the Back-End of Line with CMOS Compatible Ferroelectric Hafnium Oxide
2020
IEDM | International Electron Devices Meeting
C. Mart
S. Abdulazhanov
Malte Czernohorsky
Thomas Kämpfe
D. Lehninger
K. Falidas
Sophia Eßlinger
K. Kühnel
Sebastian Oehler
Matthias Rudolph
Maciej Wiatr
Sabine Kolodinski
R. Seidel
Wenke Weinreich
Lukas M. Eng
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Citations (4)
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