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Siddarth A. Krishnan
Siddarth A. Krishnan
High-κ dielectric
Nanotechnology
CMOS
Electronic engineering
Atomic layer deposition
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(Keynote) Atomic Layer Deposition Trends and Challenges in High-k/Metal Gate and Alternative Channel CMOS Processing
2014
Michael P. Chudzik
Siddarth A. Krishnan
Min Dai
Shahab Siddiqui
Joseph F. Shepard
Unoh Kwon
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