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Wilfried Lerch
Wilfried Lerch
Centrotherm Photovoltaics
Plasma
Materials science
Analytical chemistry
Plasma processing
Semiconductor
4
Papers
13
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0
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High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation
2017
Microelectronic Engineering
M. Czernohorsky
K. Seidel
K. Kühnel
Jürgen Niess
Nicole Sacher
Wilhelm Kegel
Wilfried Lerch
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Apparatus and method for plasma processing of wafers
2015
Michael Klick
Ralf Rothe
Wilfried Lerch
Johannes Rehli
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Plasma processing system for wafers
2015
Michael Klick
Ralf Rothe
Wilfried Lerch
Johannes Rehli
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Reflow process optimization for micro-bumps applications in 3D technology
2014
ESTC | Electronics System-integration Technology Conference
Jaber Derakhshandeh
Inge De Preter
Luke England
Daniel Schmid
John Slabbekoorn
George Vakanas
Teng Wang
Gerald Beyer
Eric Beyne
Erik Jan Marinissen
Kenneth June Rebibis
Wilfried Lerch
Andy Miller
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Citations (12)
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