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Tan-Chen Lee
Tan-Chen Lee
TSMC
Materials science
Analytical chemistry
Transmission electron microscopy
Sample preparation
Nanotechnology
4
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191
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Recent advances in electron tomography: TEM and HAADF-STEM tomography for materials science and semiconductor applications.
2005
Microscopy and Microanalysis
Christian Kübel
Andreas Voigt
Remco Schoenmakers
Max Otten
David Su
Tan-Chen Lee
Anna Carlsson
John P. Bradley
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The effect of geometry in the characterization of barrier profile in vias by transmission electron microscopy
2004
IPFA | International Symposium on the Physical and Failure Analysis of Integrated Circuits
Li-Chien Chen
Tan-Chen Lee
Jui-Yen Huang
David Su
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Planarization Processes for Pre-FIB Sample Preparation
2002
Microscopy and Microanalysis
Tan-Chen Lee
J. Y. Huang
L C Chen
Dong Su
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Methodology for TEM Analysis of Barrier Profiles
2002
Tan-Chen Lee
Jui-Yen Huang
Li-Chien Chen
Ruey-Lian Hwang
David Su
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Citations (4)
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