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Shunpei Kodama
Shunpei Kodama
Dry etching
Photomask
Electronic engineering
Phase-shift mask
Materials science
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Dry etching technologies for Cr film
2018
Kei Hattori
Takashi Miyamoto
Yoshinori Iino
Shunpei Kodama
Yoshie Okamoto
Kazuki Nakazawa
Makoto Karyu
Hideaki Terakado
Hiroki Shirahama
Hirotsugu Ita
Tomoaki Yoshimori
Hidehito Azumano
Makoto Muto
Mumenori Iwami
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