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Hirotsugu Ita
Hirotsugu Ita
Dry etching
Etching
Materials science
Photomask
Optics
5
Papers
2
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Dry etching technologies for Cr film
2018
Kei Hattori
Takashi Miyamoto
Yoshinori Iino
Shunpei Kodama
Yoshie Okamoto
Kazuki Nakazawa
Makoto Karyu
Hideaki Terakado
Hiroki Shirahama
Hirotsugu Ita
Tomoaki Yoshimori
Hidehito Azumano
Makoto Muto
Mumenori Iwami
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Plasma technology for advanced quartz mask etching
2014
Munenori Iwami
Hirotsugu Ita
Yoshihisa Kase
Hidehito Azumano
Kazuki Nakazawa
Yoshie Okamoto
Hiroki Shirahama
Tomoaki Yoshimori
Makoto Muto
Ivan Ganachev
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Dry etching technologies for reflective multilayer
2012
Yoshinori Iino
Makoto Karyu
Hirotsugu Ita
Yoshihisa Kase
Tomoaki Yoshimori
Makoto Muto
Mikio Nonaka
Munenori Iwami
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Dry etching technologies for the advanced binary film
2011
Yoshinori Iino
Makoto Karyu
Hirotsugu Ita
Tomoaki Yoshimori
Hidehito Azumano
Makoto Muto
Mikio Nonaka
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Dry etching technologies for EUV mask
2010
Yoshinori Iino
Makoto Karyu
Hirotsugu Ita
Tomoaki Yoshimori
Hidehito Azumano
Mikio Nonaka
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