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M. G. Chen
M. G. Chen
United Microelectronics Corporation
Electronic engineering
Electrical engineering
MOSFET
Computer science
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2
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4
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0
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Extending the reliability scaling limit of gate dielectrics through remote plasma nitridation of N/sub 2/O-grown oxides and NO RTA treatment
2002
IRPS | International Reliability Physics Symposium
Chuan-Hsi Liu
Hsiu Shan Lin
Yu-Yin Lin
M. G. Chen
Tung-Ming Pan
C. J. Kao
K. T. Huang
S.H. Lin
Y. C. Sheng
Wen-Tung Chang
Joo-Hyung Lee
M. Huang
Chiung Sheng Hsiung
Shiang Huang-Lu
Chen-Chung Hsu
Alan Y. Liang
Jenkon Chen
W. Y. Hsieh
P. W. Yen
S. C. Chien
Y. T. Loh
Yih J. Chang
Fu Tai Liou
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Citations (3)
Analysis of hot-carrier degradation in 0.25-/spl mu/m surface-channel pMOSFET devices
1999
VLSI-TSA | International Symposium on VLSI Technology, Systems, and Applications
Chuan H. Liu
M. G. Chen
Shiang Huang-Lu
Y. J. Chang
Kuan-Yu Fu
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Citations (1)
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