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Takanori Matsumoto
Takanori Matsumoto
Toshiba
Nanotechnology
Dry etching
Optoelectronics
Duty cycle
Isotropic etching
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Dry etch challenges for CD shrinkage in memory process
2015
Proceedings of SPIE
Takaya Matsushita
Takanori Matsumoto
Hidefumi Mukai
Suigen Kyoh
Kohji Hashimoto
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