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Oliver Rattunde

6

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Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

2018 Surface & Coatings Technology
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Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters

2017 IUS | Internaltional Ultrasonics Symposium
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Sputter deposition technology for Al (1−x) Sc x N films with high Sc concentration

2017 CSTIC | China Semiconductor Technology International Conference
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Superior film composition uniformity and adjustable composition for the next generation MO technology

2002 Transactions of the Magnetics Society of Japan
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