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Seiji Kobayashi
Seiji Kobayashi
Japan Atomic Energy Agency
Inductively coupled plasma
Plasma
Capacitively coupled plasma
Physics
Radio frequency
5
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1
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Transition of RF internal antenna plasma by gas control
2012
Takafumi Hamajima
T. Yamauchi
Seiji Kobayashi
Toshihito Hiruta
Yoshinori Kanno
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Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna
2012
Japanese Journal of Applied Physics
T. Yamauchi
Seiji Kobayashi
Hideyuki Sugibayashi
Toshiyuki Tachibana
Shunya Naitoh
Yoshinori Kanno
Toshihito Hiruta
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Behavior of Transition into Inductively Coupled Plasma Mode with Internal Radio Frequency Multiturn Antenna
2008
Japanese Journal of Applied Physics
Keita Nakagaki
Toshihiko Yamauchi
Yoshinori Kanno
Seiji Kobayashi
Ryou Takemoto
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Advanced Ceramics Synthesized by Inductively Coupled Plasma with Inner RF Antenna
2008
Japanese Journal of Applied Physics
Keita Nakagaki
Toshihiko Yamauchi
Yoshinori Kanno
Seiji Kobayashi
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Study of Diamond Synthesis by Inductively Coupled Plasma with Inside RF Antenna and CO 2 Laser
2007
CLEO | Conference on Lasers and Electro-Optics
Keita Nakagaki
Toshihiko Yamauchi
Yoshinori Kanno
Seiji Kobayashi
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