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Toshihito Hiruta
Toshihito Hiruta
Inductively coupled plasma
Plasma
Capacitively coupled plasma
Radio frequency
Atmospheric-pressure plasma
2
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Transition of RF internal antenna plasma by gas control
2012
Takafumi Hamajima
T. Yamauchi
Seiji Kobayashi
Toshihito Hiruta
Yoshinori Kanno
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Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna
2012
Japanese Journal of Applied Physics
T. Yamauchi
Seiji Kobayashi
Hideyuki Sugibayashi
Toshiyuki Tachibana
Shunya Naitoh
Yoshinori Kanno
Toshihito Hiruta
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