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Hemant Vats
Hemant Vats
IMEC
Optics
Measure (mathematics)
Extreme ultraviolet lithography
Physics
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Electrically measurable test structures to capture and classify EUV stochastics
2019
Hemant Vats
Ryan Ryoung han Kim
Yasser Sherazi
Youssef Drissi
Kurt G. Ronse
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