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Corinne Duluard
Corinne Duluard
Analytical chemistry
Passivation
Chemistry
Surface layer
Inorganic chemistry
3
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54
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In situ x-ray photoelectron spectroscopy analysis of SiOxFy passivation layer obtained in a SF6/O2 cryoetching process
2009
Applied Physics Letters
Jérémy Pereira
Laurianne Pichon
Remi Dussart
Christophe Cardinaud
Corinne Duluard
El Houcine Oubensaid
Philippe Lefaucheux
Mohamed Boufnichel
Pierre Ranson
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Citations (52)
Effect of the addition of SF 6 and N 2 in inductively coupled SiCl 4 plasma for GaN etching
2009
Semiconductor Science and Technology
El Houcine Oubensaid
Corinne Duluard
Laurianne Pichon
Jérémy Pereira
Mohamed Boufnichel
P. Lefaucheux
R Dussart
Pierre Ranson
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Citations (2)
Etude de nouvelles voies de passivation non polymérisante pour la gravure profonde du silicium
2009
Corinne Duluard
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