Old Web
English
Sign In
Acemap
>
authorDetail
>
Philippe Lefaucheux
Philippe Lefaucheux
Physics
Plasma
Analytical chemistry
Atomic physics
Materials science
4
Papers
52
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Direct current parallel microdischarges in helium
2016
arXiv: Plasma Physics
Thierry Dufour
Remi Dussart
Lawrence Overzet
Philippe Lefaucheux
Pierre Ranson
Jeong Lee
Monali Mandra
Matthew Goeckner
N. Sadeghi
Show All
Source
Cite
Save
Citations (0)
A novel low temperature etch approach to reduce ULK plasma damage
2015
Liping Zhang
Jean François de Marneffe
Floriane Leroy
Rami Ljazouli
Philippe Lefaucheux
Thomas Tillocher
Remi Dussart
Kaoru Maekawa
Koichi Yatsuda
Christian Dussarat
Stefan De Gendt
Mikhail R. Baklanov
Show All
Source
Cite
Save
Citations (0)
In situ x-ray photoelectron spectroscopy analysis of SiOxFy passivation layer obtained in a SF6/O2 cryoetching process
2009
Applied Physics Letters
Jérémy Pereira
Laurianne Pichon
Remi Dussart
Christophe Cardinaud
Corinne Duluard
El Houcine Oubensaid
Philippe Lefaucheux
Mohamed Boufnichel
Pierre Ranson
Show All
Source
Cite
Save
Citations (52)
Technologie des réacteurs à plasmas: Plasmas inductifset capacitifs en basse pression
2004
Philippe Lefaucheux
Show All
Source
Cite
Save
Citations (0)
1