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Muneyuki Matsumoto
Muneyuki Matsumoto
Nanotechnology
Inorganic chemistry
Chemistry
Metal
hard mask
2
Papers
3
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0
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2024
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High-Performance Extremely Low-k Film Integration Technology with Metal Hard Mask Process for Cu Interconnects
2016
ECS Journal of Solid State Science and Technology
Naoki Torazawa
Susumu Matsumoto
Takeshi Harada
Yasunori Morinaga
Daisuke Inagaki
Tatsuya Kabe
Shuji Hirao
Kohei Seo
S. Suzuki
Hayato Korogi
Hideaki Okamura
Yusuke Kanda
Masayuki Watanabe
Muneyuki Matsumoto
Kiyomi Hagihara
Tetsuya Ueda
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Citations (3)
Irregular growth of PECVD-Ti silicide film on doped Si substrates
2000
IITC | International Interconnect Technology Conference
Kaori Tai
Yusuke Harada
Muneyuki Matsumoto
Hisanori Oki
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