Old Web
English
Sign In
Acemap
>
authorDetail
>
K. Mestadi
K. Mestadi
STMicroelectronics
Contact angle
Immersion lithography
Lithography
Root cause
Composite material
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Investigation on Immersion Defectivity Root Cause
2007
Vincent Farys
S. Gaugiran
David Cruau
K. Mestadi
Scott Warrick
Michael Benndorf
R. Feilleux
C. Sourd
Show All
Source
Cite
Save
Citations (1)
1