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Yasuko Saito
Yasuko Saito
ASML Holding
Integrated circuit layout
Continuous phase modulation
Chip
Curvilinear coordinates
Process control
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Manufacturing challenges for curvilinear masks
2017
Chris Spence
Quan Zhang
Vincent Shu
Been-Der Chen
Stanislas Baron
Yasuko Saito
Masakazu Hamaji
Yasuaki Horima
Shuichiro Ohara
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