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Jenq-Yang Chang
Jenq-Yang Chang
Central University, India
Materials science
Thin film
Electron cyclotron resonance
Plasma
Nuclear magnetic resonance
5
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2
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0
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Growth of hydrogenated microcrystalline silicon thin films using electron cyclotron resonance chemical deposition method
2014
AM-FPD | International Workshop on Active-Matrix Flatpanel Displays and Devices
Teng-Hsiang Chang
Yen-Ho Chu
Chien-Chieh Lee
Jenq-Yang Chang
Tomi T. Li
I-Chen Chen
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CVD Characteristics and Mechanism of a-Si:H thin Films in Electron Cyclotron Resonance H2-Ar-SiH4 Plasma
2014
Li Cheng Hu
C. J. Wang
Y. W. Lin
T.-C. Wei
Chien-Chieh Lee
Jenq-Yang Chang
I-Chen Chen
Tomi T. Li
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Research Article Low Temperature (180 ∘ C) Growth of Smooth Surface Germanium Epilayers on Silicon Substrates Using Electron Cyclotron Resonance Chemical Vapor Deposition
2014
Teng-Hsiang Chang
Chiao Chang
Yen-Ho Chu
Chien-Chieh Lee
Jenq-Yang Chang
I-Chen Chen
Tomi T. Li
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Investigation of a-Si:H Films as Passivation Layer in Heterojunction Interface at Low Temperature
2014
Yen-Ho Chu
Chien-Chieh Lee
Teng-Hsiang Chang
Yu-Lin Hsieh
Shian-Ming Liu
Jenq-Yang Chang
Tomi T. Li
I-Chen Chen
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Optical Emission Spectroscopy Studies in ECR Plasma Used for the Deposition of Silicon Oxide Film
2013
Yu-Lin Hsieh
Shan-Yuan Chang
Tomi T. Li
Li-Cheng Hu
Chien-Chieh Lee
Jenq-Yang Chang
I-Chen Chen
Yen-Ho Chu
J.Y. Lee
S. H. Wang
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