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Stefan Meusemann
Stefan Meusemann
Engineering
Critical dimension
Artificial intelligence
Reticle
Engineering drawing
5
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1
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0
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Machine learning methods applied to process qualification
2018
Clemens Utzny
Stefan Meusemann
Mark Herrmann
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Intra-field CDU map correlation between SEMs and aerial image characterization
2014
Guoxiang Ning
Peter Philipp
Lloyd C. Litt
Stefan Meusemann
Thomas Thaler
Kristian Schulz
Martin Tschinkl
Paul Ackmann
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CD control with defect inspection: you can teach an old dog a new trick
2012
Clemens Utzny
Albrecht Ullrich
Jan Heumann
Elias Mohn
Stefan Meusemann
Rolf Seltmann
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Comparison of critical dimension measurementsof a mask inspection system with a CD-SEM
2012
Jan Heumann
Albrecht Ullrich
Clemens Utzny
Stefan Meusemann
Frank Kromer
John Whittey
Edgardo Garcia
Mark Wagner
Norbert Schmidt
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Tales of scales: how to enable backup process tool qualification for high-end photomasks
2012
G.R. Cantrell
Christian Bürgel
Martin Sczyrba
Jan Heumann
Stefan Meusemann
Clemens Utzny
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