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Chi-Tsung Tasi

National Chung Hsing University

5

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Structural and Stress Properties of AlGaN Epilayers Grown on AlN-Nanopatterned Sapphire Templates by Hydride Vapor Phase Epitaxy

2018 Nanomaterials
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Surface evolution and effect of V/III ratio modulation on etch-pit-density improvement of thin AlN templates on nano-patterned sapphire substrates by metalorganic chemical vapor deposition

2018 Applied Surface Science
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Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings

2017 Nanomaterials
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Reduction of Defects in AlGaN Grown on Nanoscale-Patterned Sapphire Substrates by Hydride Vapor Phase Epitaxy

2017 Materials
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85% internal quantum efficiency of 280-nm AlGaN multiple quantum wells by defect engineering

2017 Scientific Reports
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