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Katsuya Yamada
Katsuya Yamada
Toshiba
Plasma
Ashing
Slot antenna
Wafer
Microwave
3
Papers
2
Citations
0
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2024
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High-Rate and Low-Damage Downflow Process with Microwave-Excited Plasma Source Using a Slot Antenma for 300mm Wafers.
2001
Journal of The Japan Society for Precision Engineering
Masaaki Kanoh
Takahiko Moriya
Masaaki Furuya
Takeshi Yamauchi
Osamu Yamazaki
Katsuaki Aoki
Katsuya Yamada
Yoshinori Kataoka
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Plasma ashing using microwaves via slot antenna for 300-mm wafers
1999
Masaaki Furuya
Masaaki Kano
Fujio Terai
Katsuaki Aoki
Takeshi Yamauchi
Katsuya Yamada
Koichi Tamai
Hidehito Azumano
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Plasma ashing using microwave via slot antenna for 300mm wafers
1999
Masaaki Furuya
Masaaki Kano
Fujio Terai
Katsuaki Aoki
Takeshi Yamauchi
Katsuya Yamada
K. Tamai
H. Azumano
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