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Koichi Tamai
Koichi Tamai
Toshiba
Plasma
Ashing
Micrometer
Optoelectronics
Slot antenna
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Plasma ashing using microwaves via slot antenna for 300-mm wafers
1999
Masaaki Furuya
Masaaki Kano
Fujio Terai
Katsuaki Aoki
Takeshi Yamauchi
Katsuya Yamada
Koichi Tamai
Hidehito Azumano
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