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Boris Yokhin
Boris Yokhin
Metrology
Thin film
Materials science
Optics
Analytical chemistry
5
Papers
2
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A Novel X‐ray Diffraction and Reflectivity Tool for Front‐End of Line Metrology
2011
Matthew Wormington
Boris Yokhin
David Berman
Alexander Krokhmal
Isaac Mazor
Paul Ryan
John Wall
Richard Bytheway
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Compact X‐ray Tool For Critical‐Dimension Metrology
2009
Boris Yokhin
Alexander Krokhmal
Alexander Dikopoltsev
David Berman
Isaac Mazor
Byoung-Ho Lee
Dongchul Ihm
Kwang Hoon Kim
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Thin Film Metrology - X-ray Methods
2009
Boris Yokhin
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Microanalyse aux rayons x de films minces
2000
Long Vu
Boris Yokhin
Isaac Mazor
Amos Gvirtzman
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In-line x-ray fluorescence metrology of metals and ultrathin barrier layers for ULSI applications
1998
Yosi Y. Shacham-Diam
Boris Yokhin
Itzhak Mazor
Avishai Kepten
Roey Shaviv
Ayelet Gabai
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