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Tahara Shigeru
Tahara Shigeru
Materials science
Etching
Porosity
Boiling point
Analytical chemistry
3
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Plasma processes applied to SiO2 cryo-atomic layer etching
2019
Antoun Gaelle
Remi Dussart
Philippe Lefaucheux
Thomas Tillocher
Tahara Shigeru
Kumiko Yamazaki
Koichi Yatsuda
Faguet Jacques
Kaoru Maekawa
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PROCÉDÉ DE GRAVURE DE COUCHE DE CUIVRE
2017
Tahara Shigeru
tahara zi
Urayama Daisuke
urayama daisuke
Matsumoto Kenji
matumoto kenzi
Miyoshi Hidenori
miyosi hidenori
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Advance in low-k cryogenic etching of porous organoscilicate : Investigation of a new gas with higher boiling point Organic (HBPO) and comparison with C4F8
2016
Floriane Leroy
Nataniel Brochu
Romain Chanson
Remi Dussart
Thomas Tillocher
Jean-Francois de Marneffe
Zhang Liping
Kaoru Maekawa
Koichi Yatsuda
Tahara Shigeru
Christian Dussarrat
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