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Gilles Cunge
Gilles Cunge
Analytical chemistry
Chemistry
Physics
Plasma etching
Materials science
5
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26
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Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)
2013
Journal of Micro-nanolithography Mems and Moems
Xavier Chevalier
Célia Nicolet
Raluca Tiron
Ahmed Gharbi
Maxime Argoud
J. Pradelles
M. Delalande
Gilles Cunge
Guillaume Fleury
Georges Hadziioannou
Christophe Navarro
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Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process
2012
Thierry Chevolleau
Gilles Cunge
M. Delalande
Xavier Chevalier
Raluca Tiron
Sylvain David
Maxime Darnon
Christophe Navarro
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Synchronous Plasma Pulsing for Etch Applications
2010
Bulletin of the American Physical Society
Maxime Darnon
C Petit Etienne
Erwine Pargon
Gilles Cunge
Laurent Vallier
P. Bodart
M. Haass
Olivier Joubert
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Plasma-walls interaction and process drifts during silicon gate etching processes
2003
Gilles Cunge
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Diagnostics optiques et electriques dans les plasmas. Application a l'etude des interactions plasma - surface pour la micro-electronique
1997
Gilles Cunge
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