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Adriaan J. M. Mackus
Adriaan J. M. Mackus
Stanford University
Atomic layer deposition
Chemical engineering
Atomic layer epitaxy
Deposition (law)
Analytical chemistry
2
Papers
101
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Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review
2019
Chemistry of Materials
Adriaan J. M. Mackus
Joel R. Schneider
Callisto MacIsaac
Jon G. Baker
Stacey F. Bent
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Citations (88)
Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition
2016
Journal of Vacuum Science and Technology
Carl Hägglund
Thomas Grehl
Jukka T. Tanskanen
Ye Sheng Yee
Marja N. Mullings
Adriaan J. M. Mackus
Callisto MacIsaac
Bruce M. Clemens
Hh Hidde Brongersma
Stacey F. Bent
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Citations (13)
1