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S.F. Shive
S.F. Shive
Electronic engineering
Charge density
Very-large-scale integration
Residual
Voltage
2
Papers
8
Citations
0
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Enabling shallow trench isolation for 0.1 /spl mu/m technologies and beyond
1999
VLSIT | Symposium on VLSI Technology
C.P. Chang
S.F. Shive
S. Kuehne
Yi Ma
H.-H. Vuong
F.H. Baumann
M. Bude
E.J. Lloyd
C.S. Pai
Mahjoub A. Abdelgadir
R. Dail
C.T. Liu
K.P. Cheung
J.I. Colonell
W.Y.C. Lai
J.F. Miner
H. Vaidya
R. Liu
J. T. Clemens
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Is surface potential measurement (SPM) a useful charging damage measurement method
1998
PPID | International Symposium on Plasma Process-Induced Damage
K.P. Cheung
J.I. Colonell
Kurt G. Steiner
S.F. Shive
T. Kook
C.P. Chang
W.Y.C. Lai
C. T. Liu
R. Liu
C-S. Pai
H. Vaidya
J. T. Clemens
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Citations (4)
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