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William J. Miller
William J. Miller
IBM
Semiconductor device fabrication
Photoresist
Undercut
Stepper
Thermal stability
3
Papers
2
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0
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INR: A negative tone I-line chemically amplified photoresist
2016
Wayne M. Moreau
Barry C. McCormick
Robert Lavin Wood
Erik A. Pulllitz
James P. Gollins
William J. Miller
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Integrated cost and productivity learning in CMOS semiconductor manufacturing
1995
Ibm Journal of Research and Development
George A. Leonovich
Anthony P. Franchino
William J. Miller
Uh-Po Eric Tsou
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INR negative resist: a negative-tone I-line chemically amplified photoresist
1994
Leo L. Linehan
Gary T. Spinillo
Randolph S. Smith
Wayne M. Moreau
Barry C. McCormick
Robert Lavin Wood
Erik A. Puttlitz
James P. Collins
William J. Miller
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